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SILICON WAFER
Silicon Wafer
SEMI Standard
2″ (50.8mm)
3″ (76.2mm)
4″ (100mm)
5″ (125mm)
6″ (150mm)
8″ (200mm)
Diameter
50.8 ± 0.38mm
76.2 ± 0.63mm
100 ± 0.5mm
125 ± 0.5mm
150 ± 0.2mm
200 ± 0.2mm
Thickness
279 ± 25µm
381 ± 25µm
525 ± 20 µm or
625 ± 20µm
625 ± 20µm
675 ± 20µm or
625 ± 15µm
725 ± 20µm
Primary Flat Length
15.88 ± 1.65mm
22.22 ± 3.17mm
32.5 ± 2.5mm
42.5 ± 2.5mm
57.5 ± 2.5mm
Notch
Secondary Flat Length
8 ± 1.65mm
11.18 ± 1.52mm
18 ± 2.0mm
27.5 ± 2.5mm
37.5 ± 2.5mm
NA
Primary Flat Location
{110} ± 1 deg.
{110} ± 1 deg.
{110} ± 1 deg.
{110} ± 1 deg.
{110} ± 1 deg.
{110} ± 1 deg.
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